Diploma Thesis from the year 2017 in the subject Physics - Optics, grade: 1.1, University of Applied Sciences Kaiserslautern (Fraunhofer Institute for Industrial Mathematics ITWM), language: English, abstract: This diploma thesis approaches the topic of data fusion from the hardware as well as the algorithmic perspective. In order to acquire data suitable for the merging process, two measurement systems are introduced featuring the opportunity to synchronously image a target with two measurement heads. Both systems allow non-destructive contact-free terahertz materials inspection with the means of the FMCW measurement principle. One scanning unit, the FusionHead, makes use of the radiation's polarization to allow collinear inspection on a target volume element with both measurement heads. This makes the data inherently suitable for the data fusion process. The second acquisition system covered in this work is the Compact system, enabling the user to image a whole component in raster scan movements obtaining a complete 3D image. Besides featuring two measurement heads, the Compact system is equipped with a control software, which synchronizes the data acquisition, raster movements, data analysis and the correct image visualization. The two measurement heads utilized in both systems feature adjacent frequency ranges, which are determined in the course of this thesis, and lead to different resolutions and penetration depths into the target. In order to make use of both their benefits and further increase the imaging resolution, the two heads' data is fused. A set of requirements, necessary for the fusion process, is defined and the data is processed to fulfill them. Furthermore, a set of gap filling algorithms is developed and implemented, which allow to fill the gap between the measurement heads' frequency ranges. The possible algorithms are tested with respect to imaging resolution and noise. The best performing procedures are put to further testing of thickness measurement in the real-life environment of an industry project.