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Multi-Wafer Rotating MEMS Machines

Turbines, Generators, and Engines, MEMS Reference Shelf

Erschienen am 30.09.2009, 1. Auflage 2009
160,49 €
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Bibliografische Daten
ISBN/EAN: 9780387777467
Sprache: Englisch
Umfang: xvi, 456 S., 302 s/w Illustr., 456 p. 302 illus.
Einband: gebundenes Buch

Beschreibung

InhaltsangabeIntroduction to PowerMEMS.- System design considerations and device overview.- Materials, structures, and packaging.- Microengine fabrication.- Fabrication of microscale rotating magnetic machines.- High-speed gas bearings for micro-turbomachinery.- Thermofluids and turbomachinery.- Motors and generators.- Microcombustors for rotating machinery.

Autorenportrait

Inhaltsangabeto PowerMEMS.- System Design Considerations and Device Overview.- Materials, Structures and Packaging.- Microengine Fabrication.- Fabrication of Microscale Rotating Magnetic Machines.- High-Speed Gas Bearings for Micro-Turbomachinery.- Thermofluidics and Turbomachinery.- Motors and Generators.- Microcombustors for Rotating Machinery.

Inhalt

Introduction to PowerMEMS.- System design considerations and device overview.- Materials, structures, and packaging.- Microengine fabrication.- Fabrication of microscale rotating magnetic machines.- High-speed gas bearings for micro-turbomachinery.- Thermofluids and turbomachinery.- Motors and generators.- Microcombustors for rotating machinery.